People |
||
Cand.-phys. Michael KleinContact: Phone: +49 721/608-7481 Email: michael.klein  physik.uni-karlsruhe.de
Research interest: Improving our electron beam lithograpy based fabrication process, increasing the reproduceability and developing alternative methods, including new resist systems and etching. Therefore, we cooperate with the IMT (FZK) in order to use their sophisticated Vistec VB6 System and their proximity correction software. |
 |
   |
||||||||||||||||
 |
Home |  |
Metamaterials? | |
Publications | |
People | |
Gallery | |
Links | |
Contact | |
Legal Notice |  |
|
||||||||||||||||
 |
||||||||||||||||